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    Dynamic mechanical properties of photo resist thin films

    New search for: Chang, R.-C.
    New search for: Chen, F.-Y.
    New search for: Yang, P.-H.

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    Dynamic mechanical properties of photo resist thin films

    New search for: Chang, R.-C.
    New search for: Chen, F.-Y.
    New search for: Yang, P.-H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Dynamic mechanical properties of photo resist thin films

    New search for: Chang, R.-C.
    New search for: Chen, F.-Y.
    New search for: Yang, P.-H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Dynamic mechanical properties of photo resist thin films

    Contributors:

    Chang, R.-C. (author) / Chen, F.-Y. (author) / Yang, P.-H. (author)

    Published in:

    JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY ; 21 ; 1739-1744

    Publication date:

    2007-01-01

    Size:

    6 pages

    ISSN:

    1738-494X

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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