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Dynamic mechanical properties of photo resist thin films
Dynamic mechanical properties of photo resist thin films
Dynamic mechanical properties of photo resist thin films
Chang, R.-C. (author) / Chen, F.-Y. (author) / Yang, P.-H. (author)
JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY ; 21 ; 1739-1744
2007-01-01
6 pages
Article (Journal)
English
DDC:
621
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