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A Contact Stylus Profilometer Based on Linnik Interference Microscope
A Contact Stylus Profilometer Based on Linnik Interference Microscope
A Contact Stylus Profilometer Based on Linnik Interference Microscope
Yun, J.P. (author) / Zhang, L.L. (author) / Xie, T.B. (author) / Hu, G.Y. (author) / Jin, G.F. / Lee, W.B. / Cheung, C.F. / To, S.
2008-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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