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    A Method to Improve Uniformity of Material Removal of Chemical Mechanical Polishing in LCOS Process

    New search for: Sun, Y.H.
    New search for: Kang, R.K.
    New search for: Guo, D.M.
    New search for: Jin, G.F.
    New search for: Lee, W.B.
    New search for: Cheung, C.F.
    New search for: To, S.

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    A Method to Improve Uniformity of Material Removal of Chemical Mechanical Polishing in LCOS Process

    New search for: Sun, Y.H.
    New search for: Kang, R.K.
    New search for: Guo, D.M.
    New search for: Jin, G.F.
    New search for: Lee, W.B.
    New search for: Cheung, C.F.
    New search for: To, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    A Method to Improve Uniformity of Material Removal of Chemical Mechanical Polishing in LCOS Process

    New search for: Sun, Y.H.
    New search for: Kang, R.K.
    New search for: Guo, D.M.
    New search for: Jin, G.F.
    New search for: Lee, W.B.
    New search for: Cheung, C.F.
    New search for: To, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    A Method to Improve Uniformity of Material Removal of Chemical Mechanical Polishing in LCOS Process

    Contributors:

    Sun, Y.H. (author) / Kang, R.K. (author) / Guo, D.M. (author) / Jin, G.F. / Lee, W.B. / Cheung, C.F. / To, S.

    Published in:

    Advances in Optics Design and Precision Manufacturing Technologies ; 686-689

    KEY ENGINEERING MATERIALS ; 364/366

    Publication date:

    2008-01-01

    Size:

    4 pages

    ISSN:

    1013-9826

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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