Multiscale material removal modeling of chemical mechanical polishing

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An Analyzing on Material Removal Mechanism in Chemical Mechanical Polishing of Cu

Su, J.X. / Zhang, Y.X. / Chen, X.Q. et al. | British Library Online Contents | 2009

Modeling effect of chemical-mechanical synergy on material removal at molecular scale in chemical mechanical polishing

Wang, Y. / Zhao, Y. / Jiang, J. et al. | British Library Online Contents | 2008

Effect of Process Parameters on Material Removal Rate in Chemical Mechanical Polishing of 6H-SiC(0001)

An, J.H. / Lee, G.S. / Lee, W.J. et al. | British Library Online Contents | 2009

A mathematical model for material removal and chemical-mechanical synergy in chemical-mechanical polishing at molecular scale

Bai, J. / Zhao, Y. W. / Wang, Y. G. | British Library Online Contents | 2007