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Stage Equipped with Single Actuator for Nano-Positioning in Large Travel Range

Wang, Y.C. / Lin, C.J. / Chen, C.J. / Liou, H.C.

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Stage Equipped with Single Actuator for Nano-Positioning in Large Travel Range

Wang, Y.C. / Lin, C.J. / Chen, C.J. / Liou, H.C.

Stage Equipped with Single Actuator for Nano-Positioning in Large Travel Range

Wang, Y.C. / Lin, C.J. / Chen, C.J. / Liou, H.C.

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Check availability in my library

Order at Subito €

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Document information

Title:

Stage Equipped with Single Actuator for Nano-Positioning in Large Travel Range

Contributors:

Wang, Y.C. (author) / Lin, C.J. (author) / Chen, C.J. (author) / Liou, H.C. (author) / Jin, G.F. / Lee, W.B. / Cheung, C.F. / To, S.

Published in:

Advances in Optics Design and Precision Manufacturing Technologies ; 768-772

KEY ENGINEERING MATERIALS ; 364/366

Publication date:

2008-01-01

Size:

5 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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