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Dry etching of CuCrO2 thin films

Lim, W. T. / Sadik, P. W. / Norton, D. P. / Pearton, S. J. / Ren, F.

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Dry etching of CuCrO2 thin films

Lim, W. T. / Sadik, P. W. / Norton, D. P. / Pearton, S. J. / Ren, F.

Dry etching of CuCrO2 thin films

Lim, W. T. / Sadik, P. W. / Norton, D. P. / Pearton, S. J. / Ren, F.

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Check availability in my library

Order at Subito €

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Document information

Title:

Dry etching of CuCrO2 thin films

Contributors:

Lim, W. T. (author) / Sadik, P. W. (author) / Norton, D. P. (author) / Pearton, S. J. (author) / Ren, F. (author)

Published in:

APPLIED SURFACE SCIENCE ; 254 ; 2359-2363

Publication date:

2008-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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