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Two-dimensional dopant profiling of silicon with submicron resolution using near field optics on silicon/electrolyte contacts
Two-dimensional dopant profiling of silicon with submicron resolution using near field optics on silicon/electrolyte contacts
Two-dimensional dopant profiling of silicon with submicron resolution using near field optics on silicon/electrolyte contacts
Djebbouri, M. (author) / Bertin, F. (author) / Kesri, N. (author) / Bsiesy, A. (author)
APPLIED SURFACE SCIENCE ; 254 ; 2725-2729
2008-01-01
5 pages
Article (Journal)
English
DDC:
621.35
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