Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Two-dimensional dopant profiling of silicon with submicron resolution using near field optics on silicon/electrolyte contacts
Two-dimensional dopant profiling of silicon with submicron resolution using near field optics on silicon/electrolyte contacts
Two-dimensional dopant profiling of silicon with submicron resolution using near field optics on silicon/electrolyte contacts
Djebbouri, M. (Autor:in) / Bertin, F. (Autor:in) / Kesri, N. (Autor:in) / Bsiesy, A. (Autor:in)
APPLIED SURFACE SCIENCE ; 254 ; 2725-2729
01.01.2008
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Shallow boron dopant on silicon
| British Library Online Contents | 2004
Two-Dimensional Dopant Profiling by Scanning Capacitance Microscopy
| British Library Online Contents | 1999
Scanning electric field sensing for semiconductor dopant profiling
| British Library Online Contents | 2002