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Fabrication of Piezoelectrically Driven Micropump with Sol-Gel PZT Films

Qiu, C.-j. / Qu, W. / Liu, H.-m. / Zhao, Q.-l. / Bu, D. / Cao, M.-s.

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Fabrication of Piezoelectrically Driven Micropump with Sol-Gel PZT Films

Qiu, C.-j. / Qu, W. / Liu, H.-m. / Zhao, Q.-l. / Bu, D. / Cao, M.-s.

Fabrication of Piezoelectrically Driven Micropump with Sol-Gel PZT Films

Qiu, C.-j. / Qu, W. / Liu, H.-m. / Zhao, Q.-l. / Bu, D. / Cao, M.-s.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Fabrication of Piezoelectrically Driven Micropump with Sol-Gel PZT Films

Contributors:

Qiu, C.-j. (author) / Qu, W. (author) / Liu, H.-m. (author) / Zhao, Q.-l. (author) / Bu, D. (author) / Cao, M.-s. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -HANGZHOU- ; 25 ; 846-849

Publication date:

2007-01-01

Size:

4 pages

ISSN:

1004-793X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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