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A Piezoelectric Micropump Based on MEMS Fabrication

Wang, B.W. / Chua, X.C. / Li, L.T.

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A Piezoelectric Micropump Based on MEMS Fabrication

Wang, B.W. / Chua, X.C. / Li, L.T.

A Piezoelectric Micropump Based on MEMS Fabrication

Wang, B.W. / Chua, X.C. / Li, L.T.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

A Piezoelectric Micropump Based on MEMS Fabrication

Contributors:

Wang, B.W. (author) / Chua, X.C. (author) / Li, L.T. (author) / Pan, W. / Gong, J.

Published in:

High-Performance Ceramics V Part 1 ; 215-217

KEY ENGINEERING MATERIALS ; 368-372

Publication date:

2008-01-01

Size:

3 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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