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Hydrogen-free Carbon Films by Unbalanced Magnetron Sputtering for Infrared Anti-reflection Coatings
Hydrogen-free Carbon Films by Unbalanced Magnetron Sputtering for Infrared Anti-reflection Coatings
Hydrogen-free Carbon Films by Unbalanced Magnetron Sputtering for Infrared Anti-reflection Coatings
Xu, J.-q. (author) / Fan, H.-q. (author) / Liu, W.-g. (author) / Hang, L.-x. (author)
MATERIALS SCIENCE AND ENGINEERING -HANGZHOU- ; 25 ; 850-853
2007-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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