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Low temperature ITO thin film deposition on PES substrate using pulse magnetron sputtering

Lin, Y. C. / Li, J. Y. / Yen, W. T.

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Low temperature ITO thin film deposition on PES substrate using pulse magnetron sputtering

Lin, Y. C. / Li, J. Y. / Yen, W. T.

Low temperature ITO thin film deposition on PES substrate using pulse magnetron sputtering

Lin, Y. C. / Li, J. Y. / Yen, W. T.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Low temperature ITO thin film deposition on PES substrate using pulse magnetron sputtering

Contributors:

Lin, Y. C. (author) / Li, J. Y. (author) / Yen, W. T. (author)

Published in:

APPLIED SURFACE SCIENCE ; 254 ; 3262-3268

Publication date:

2008-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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