Effects of deposition pressure on the properties of transparent conductive ZnO:Ga films prepared by DC reactive magnetron sputtering: Fid-Bau Portal

Effects of deposition pressure on the properties of transparent conductive ZnO:Ga films prepared by DC reactive magnetron sputtering

Ma, Q. B. / Ye, Z. Z. / He, H. P. / Zhu, L. P. / Zhao, B. H.

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Effects of deposition pressure on the properties of transparent conductive ZnO:Ga films prepared by DC reactive magnetron sputtering

Ma, Q. B. / Ye, Z. Z. / He, H. P. / Zhu, L. P. / Zhao, B. H.

Effects of deposition pressure on the properties of transparent conductive ZnO:Ga films prepared by DC reactive magnetron sputtering

Ma, Q. B. / Ye, Z. Z. / He, H. P. / Zhu, L. P. / Zhao, B. H.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

Title:

Effects of deposition pressure on the properties of transparent conductive ZnO:Ga films prepared by DC reactive magnetron sputtering

Contributors:

Ma, Q. B. (author) / Ye, Z. Z. (author) / He, H. P. (author) / Zhu, L. P. (author) / Zhao, B. H. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 10 ; 167-172

Publication date:

2007-01-01

Size:

6 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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