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Fabrication of near-field optical probes using advanced functional thin films for MEMS and NEMS applications

Hyun, J. S. / Moon, J. S. / Park, J. H. / Kim, J. W. / Kim, Y. D. / Boo, J. H.

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Fabrication of near-field optical probes using advanced functional thin films for MEMS and NEMS applications

Hyun, J. S. / Moon, J. S. / Park, J. H. / Kim, J. W. / Kim, Y. D. / Boo, J. H.

Fabrication of near-field optical probes using advanced functional thin films for MEMS and NEMS applications

Hyun, J. S. / Moon, J. S. / Park, J. H. / Kim, J. W. / Kim, Y. D. / Boo, J. H.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Fabrication of near-field optical probes using advanced functional thin films for MEMS and NEMS applications

Contributors:

Hyun, J. S. (author) / Moon, J. S. (author) / Park, J. H. (author) / Kim, J. W. (author) / Kim, Y. D. (author) / Boo, J. H. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B ADVANCED FUNCTIONAL SOLID STATE MATERIALS ; 149 ; 292-298

Publication date:

2008-01-01

Size:

7 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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