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DRIE for MEMS Devices: A Cost-effective Solution

Puech, M. / Thevenoud, J.-M. / Gruffat, J.-M.

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DRIE for MEMS Devices: A Cost-effective Solution

Puech, M. / Thevenoud, J.-M. / Gruffat, J.-M.

DRIE for MEMS Devices: A Cost-effective Solution

Puech, M. / Thevenoud, J.-M. / Gruffat, J.-M.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

Similar titles

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Document information

Title:

DRIE for MEMS Devices: A Cost-effective Solution

Contributors:

Puech, M. (author) / Thevenoud, J.-M. (author) / Gruffat, J.-M. (author)

Published in:

ADVANCED PACKAGING ; 17 ; 25-28

Publication date:

2008-01-01

Size:

4 pages

ISSN:

1065-0555

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 658.564

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