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Implant Annealing - An Evolution from Soak over Spike to Millisecond Annealing

Paul, S. / Lerch, W.

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Implant Annealing - An Evolution from Soak over Spike to Millisecond Annealing

Paul, S. / Lerch, W.

Implant Annealing - An Evolution from Soak over Spike to Millisecond Annealing

Paul, S. / Lerch, W.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Implant Annealing - An Evolution from Soak over Spike to Millisecond Annealing

Contributors:

Paul, S. (author) / Lerch, W. (author) / Lerch, W. / Niess, J.

Published in:

Rapid Thermal Processing and beyond: Applications in Semiconductor Processing ; 207-228

MATERIALS SCIENCE FORUM ; 573/574

Publication date:

2008-01-01

Size:

22 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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