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Gadolinium oxide high-k gate dielectrics prepared by anodic oxidation

Kuei, P. Y. / Hu, C. C.

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Gadolinium oxide high-k gate dielectrics prepared by anodic oxidation

Kuei, P. Y. / Hu, C. C.

Gadolinium oxide high-k gate dielectrics prepared by anodic oxidation

Kuei, P. Y. / Hu, C. C.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Gadolinium oxide high-k gate dielectrics prepared by anodic oxidation

Contributors:

Kuei, P. Y. (author) / Hu, C. C. (author)

Published in:

APPLIED SURFACE SCIENCE ; 254 ; 5487-5491

Publication date:

2008-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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