Delamination-induced dielectric breakdown in Cu/low-k interconnects: Fid-Bau Portal

Delamination-induced dielectric breakdown in Cu/low-k interconnects

Tan, T.L. / Gan, C.L. / Du, A.Y. / Tan, Y.C. / Ng, C.M.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Delamination-induced dielectric breakdown in Cu/low-k interconnects

Tan, T.L. / Gan, C.L. / Du, A.Y. / Tan, Y.C. / Ng, C.M.

Delamination-induced dielectric breakdown in Cu/low-k interconnects

Tan, T.L. / Gan, C.L. / Du, A.Y. / Tan, Y.C. / Ng, C.M.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Delamination-induced dielectric breakdown in Cu/low-k interconnects

Contributors:

Tan, T.L. (author) / Gan, C.L. (author) / Du, A.Y. (author) / Tan, Y.C. (author) / Ng, C.M. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH THEN WARRENDALE- ; 23 ; 1802-1808

Publication date:

2008-01-01

Size:

7 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Morgen, M. / Ryan, E. T. / Zhao, J.-H. et al. | British Library Online Contents | 2000

Dielectric Breakdown of Polyisoxazoline

Mahrous, S. | British Library Online Contents | 2005

The strip dielectric breakdown model

ZHANG, T. Y. / ZHAO, M. H. / GAO, C. F. | British Library Online Contents | 2005

Stress analysis of microwedge indentation-induced delamination

Zhao, M. / Yao, L. / Zhang, T.-Y. | British Library Online Contents | 2009

Influence of inclusions on dielectric breakdown

Rzaev, S. G. | British Library Online Contents | 2004