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Low Dielectric Constant Materials for ULSI Interconnects

Morgen, M. / Ryan, E. T. / Zhao, J.-H. / Hu, C. / Cho, T. / Ho, P. S.

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Low Dielectric Constant Materials for ULSI Interconnects

Morgen, M. / Ryan, E. T. / Zhao, J.-H. / Hu, C. / Cho, T. / Ho, P. S.

Low Dielectric Constant Materials for ULSI Interconnects

Morgen, M. / Ryan, E. T. / Zhao, J.-H. / Hu, C. / Cho, T. / Ho, P. S.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Low Dielectric Constant Materials for ULSI Interconnects

Contributors:

Morgen, M. (author) / Ryan, E. T. (author) / Zhao, J.-H. (author) / Hu, C. (author) / Cho, T. (author) / Ho, P. S. (author)

Published in:

ANNUAL REVIEW OF MATERIALS SCIENCE ; 30 ; 645-680

Publication date:

2000-01-01

Size:

36 pages

ISSN:

0084-6600

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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