Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    Numerical analysis of the process-induced stresses in silicon microstructures: application to micromachined cantilever

    New search for: Senez, V.
    New search for: Hoffmann, T.
    New search for: Armigliato, A.
    New search for: De Wolf, I.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Numerical analysis of the process-induced stresses in silicon microstructures: application to micromachined cantilever

    New search for: Senez, V.
    New search for: Hoffmann, T.
    New search for: Armigliato, A.
    New search for: De Wolf, I.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Numerical analysis of the process-induced stresses in silicon microstructures: application to micromachined cantilever

    New search for: Senez, V.
    New search for: Hoffmann, T.
    New search for: Armigliato, A.
    New search for: De Wolf, I.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Numerical analysis of the process-induced stresses in silicon microstructures: application to micromachined cantilever

    Contributors:

    Senez, V. (author) / Hoffmann, T. (author) / Armigliato, A. (author) / De Wolf, I. (author)

    Published in:

    SMART MATERIALS AND STRUCTURES ; 15 ; S47-S56

    Publication date:

    2006-01-01

    Size:

    S47-S56

    ISSN:

    0964-1726

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  530

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    Numerical and Experimental Analysis of Quench Induced Stresses and Microstructures

    Hakan Gur, C. / Erman Tekkaya, A. | British Library Online Contents | 1998

    Micro-Raman Analysis of a Micromachined 3C-SiC Cantilever

    Piluso, N. / Anzalone, R. / Camarda, M. et al. | British Library Online Contents | 2012

    Micromachined Si cantilever arrays for parallel AFM operation

    Ahn, Y. / Ono, T. / Esashi, M. | British Library Online Contents | 2008

    Cantilever Stresses in Ring Tension Reservoirs

    Crist, Marion L. | Wiley | 1934

    Length and Width Effects of Metal Films on Stress-Induced Bending of Surface Micromachined Cantilever Curved Grating

    Kuo, J.-N. | British Library Online Contents | 2012

    Back to top