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Phosphorous doped Ru film for advanced Cu diffusion barriers

Perng, D. C. / Yeh, J. B. / Hsu, K. C.

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Phosphorous doped Ru film for advanced Cu diffusion barriers

Perng, D. C. / Yeh, J. B. / Hsu, K. C.

Phosphorous doped Ru film for advanced Cu diffusion barriers

Perng, D. C. / Yeh, J. B. / Hsu, K. C.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Phosphorous doped Ru film for advanced Cu diffusion barriers

Contributors:

Perng, D. C. (author) / Yeh, J. B. (author) / Hsu, K. C. (author)

Published in:

APPLIED SURFACE SCIENCE ; 254 ; 6059-6062

Publication date:

2008-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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