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Low temperature selective epitaxial growth of SiGe layers using various dielectric mask patterns and process conditions

Choi, A. R. / Choi, S. S. / Kim, J. T. / Cho, D. H. / Han, T. H. / Shim, K. H.

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Low temperature selective epitaxial growth of SiGe layers using various dielectric mask patterns and process conditions

Choi, A. R. / Choi, S. S. / Kim, J. T. / Cho, D. H. / Han, T. H. / Shim, K. H.

Low temperature selective epitaxial growth of SiGe layers using various dielectric mask patterns and process conditions

Choi, A. R. / Choi, S. S. / Kim, J. T. / Cho, D. H. / Han, T. H. / Shim, K. H.

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Document information

Title:

Low temperature selective epitaxial growth of SiGe layers using various dielectric mask patterns and process conditions

Contributors:

Choi, A. R. (author) / Choi, S. S. (author) / Kim, J. T. (author) / Cho, D. H. (author) / Han, T. H. (author) / Shim, K. H. (author)

Published in:

APPLIED SURFACE SCIENCE ; 254 ; 6081-6085

Publication date:

2008-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Regolini, J. L. / Pejnefors, J. / Baffert, T. et al. | British Library Online Contents | 1998

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Vescan, L. / Stoica, T. / Goryll, M. et al. | British Library Online Contents | 1998

Selective epitaxial growth of SiGe alloys - influence of growth parameters on film properties

Vescan, L. | British Library Online Contents | 1994