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Selective epitaxial growth of SiGe for strained Si transistors

Ning, X. J. / Gao, D. / Bonfanti, P. / Wu, H. / Guo, J. / Chen, J. / Shen, C. C. / Chen, I. C. / Cherng, G.

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Selective epitaxial growth of SiGe for strained Si transistors

Ning, X. J. / Gao, D. / Bonfanti, P. / Wu, H. / Guo, J. / Chen, J. / Shen, C. C. / Chen, I. C. / Cherng, G.

Selective epitaxial growth of SiGe for strained Si transistors

Ning, X. J. / Gao, D. / Bonfanti, P. / Wu, H. / Guo, J. / Chen, J. / Shen, C. C. / Chen, I. C. / Cherng, G.

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Document information

Title:

Selective epitaxial growth of SiGe for strained Si transistors

Contributors:

Ning, X. J. (author) / Gao, D. (author) / Bonfanti, P. (author) / Wu, H. (author) / Guo, J. (author) / Chen, J. (author) / Shen, C. C. (author) / Chen, I. C. (author) / Cherng, G. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 134 ; 165-171

Publication date:

2006-01-01

Size:

7 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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Fabrication of strained Si nMOSFET transistors on thin buffer layers with selective and non-selective epitaxial growth techniques

Eneman, G. / Verheyen, P. / Rooyackers, R. et al. | British Library Online Contents | 2005

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Vescan, L. | British Library Online Contents | 1994

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