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    Epitaxial growth of SiGe layers for BiCMOS applications

    New search for: Regolini, J. L.
    New search for: Pejnefors, J.
    New search for: Baffert, T.
    New search for: Morin, C.
    New search for: Ribot, P.
    New search for: Jouan, S.
    New search for: Marty, M.
    New search for: Chantre, A.
    New search for: Slaoui, A.
    New search for: Singh, R. K.
    New search for: Theiler, T.
    New search for: Muller, J. C.

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    Epitaxial growth of SiGe layers for BiCMOS applications

    New search for: Regolini, J. L.
    New search for: Pejnefors, J.
    New search for: Baffert, T.
    New search for: Morin, C.
    New search for: Ribot, P.
    New search for: Jouan, S.
    New search for: Marty, M.
    New search for: Chantre, A.
    New search for: Slaoui, A.
    New search for: Singh, R. K.
    New search for: Theiler, T.
    New search for: Muller, J. C.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Epitaxial growth of SiGe layers for BiCMOS applications

    New search for: Regolini, J. L.
    New search for: Pejnefors, J.
    New search for: Baffert, T.
    New search for: Morin, C.
    New search for: Ribot, P.
    New search for: Jouan, S.
    New search for: Marty, M.
    New search for: Chantre, A.
    New search for: Slaoui, A.
    New search for: Singh, R. K.
    New search for: Theiler, T.
    New search for: Muller, J. C.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    Epitaxial growth of SiGe layers for BiCMOS applications

    Contributors:

    Regolini, J. L. (author) / Pejnefors, J. (author) / Baffert, T. (author) / Morin, C. (author) / Ribot, P. (author) / Jouan, S. (author) / Marty, M. (author) / Chantre, A. (author) / Slaoui, A. / Singh, R. K.

    Published in:

    Papers presented at the European Materials Research Society 1998 Meeting. Symposium I: Rapid Thermal Processing ; 317-324

    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 1

    Publication date:

    1998-01-01

    Size:

    8 pages

    ISSN:

    1369-8001

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.38152

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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