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    Evaluation of Si3N4/Si interface by UV Raman spectroscopy

    New search for: Ogura, A.
    New search for: Yoshida, T.
    New search for: Kosemura, D.
    New search for: Kakemura, Y.
    New search for: Aratani, T.
    New search for: Higuchi, M.
    New search for: Sugawa, S.
    New search for: Teramoto, A.
    New search for: Ohmi, T.
    New search for: Hattori, T.

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    Evaluation of Si3N4/Si interface by UV Raman spectroscopy

    New search for: Ogura, A.
    New search for: Yoshida, T.
    New search for: Kosemura, D.
    New search for: Kakemura, Y.
    New search for: Aratani, T.
    New search for: Higuchi, M.
    New search for: Sugawa, S.
    New search for: Teramoto, A.
    New search for: Ohmi, T.
    New search for: Hattori, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Evaluation of Si3N4/Si interface by UV Raman spectroscopy

    New search for: Ogura, A.
    New search for: Yoshida, T.
    New search for: Kosemura, D.
    New search for: Kakemura, Y.
    New search for: Aratani, T.
    New search for: Higuchi, M.
    New search for: Sugawa, S.
    New search for: Teramoto, A.
    New search for: Ohmi, T.
    New search for: Hattori, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
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    Document information
    Title:

    Evaluation of Si3N4/Si interface by UV Raman spectroscopy

    Contributors:

    Ogura, A. (author) / Yoshida, T. (author) / Kosemura, D. (author) / Kakemura, Y. (author) / Aratani, T. (author) / Higuchi, M. (author) / Sugawa, S. (author) / Teramoto, A. (author) / Ohmi, T. (author) / Hattori, T. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 254 ; 6229-6231

    Publication date:

    2008-01-01

    Size:

    3 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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