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    Wet cleaning and surface characterization of Si1-xGex virtual substrates after a CMP step

    New search for: Abbadie, A.
    New search for: Hartmann, J. M.
    New search for: Besson, P.
    New search for: Rouchon, D.
    New search for: Martinez, E.
    New search for: Holliger, P.
    New search for: Di Nardo, C.
    New search for: Campidelli, Y.
    New search for: Billon, T.

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    Wet cleaning and surface characterization of Si1-xGex virtual substrates after a CMP step

    New search for: Abbadie, A.
    New search for: Hartmann, J. M.
    New search for: Besson, P.
    New search for: Rouchon, D.
    New search for: Martinez, E.
    New search for: Holliger, P.
    New search for: Di Nardo, C.
    New search for: Campidelli, Y.
    New search for: Billon, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Wet cleaning and surface characterization of Si1-xGex virtual substrates after a CMP step

    New search for: Abbadie, A.
    New search for: Hartmann, J. M.
    New search for: Besson, P.
    New search for: Rouchon, D.
    New search for: Martinez, E.
    New search for: Holliger, P.
    New search for: Di Nardo, C.
    New search for: Campidelli, Y.
    New search for: Billon, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Wet cleaning and surface characterization of Si1-xGex virtual substrates after a CMP step

    Contributors:

    Abbadie, A. (author) / Hartmann, J. M. (author) / Besson, P. (author) / Rouchon, D. (author) / Martinez, E. (author) / Holliger, P. (author) / Di Nardo, C. (author) / Campidelli, Y. (author) / Billon, T. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 254 ; 6793-6798

    Publication date:

    2008-01-01

    Size:

    6 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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