Mechanism of the etching rate change of aluminosilicate glass in HF acid with micro-indentation: Fid-Bau Portal

Mechanism of the etching rate change of aluminosilicate glass in HF acid with micro-indentation

Saito, Y. / Okamoto, S. / Inomata, H. / Kurachi, J.

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Mechanism of the etching rate change of aluminosilicate glass in HF acid with micro-indentation

Saito, Y. / Okamoto, S. / Inomata, H. / Kurachi, J.

Mechanism of the etching rate change of aluminosilicate glass in HF acid with micro-indentation

Saito, Y. / Okamoto, S. / Inomata, H. / Kurachi, J.

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Document information

Title:

Mechanism of the etching rate change of aluminosilicate glass in HF acid with micro-indentation

Contributors:

Saito, Y. (author) / Okamoto, S. (author) / Inomata, H. (author) / Kurachi, J. (author)

Published in:

APPLIED SURFACE SCIENCE ; 255 ; 2290-2294

Publication date:

2008-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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