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Modification of silicon waveguide structures using ion implantation induced defects

Knights, A. P. / Dudeck, K. J. / Walters, W. D. / Coleman, P. G.

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Modification of silicon waveguide structures using ion implantation induced defects

Knights, A. P. / Dudeck, K. J. / Walters, W. D. / Coleman, P. G.

Modification of silicon waveguide structures using ion implantation induced defects

Knights, A. P. / Dudeck, K. J. / Walters, W. D. / Coleman, P. G.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Modification of silicon waveguide structures using ion implantation induced defects

Contributors:

Knights, A. P. (author) / Dudeck, K. J. (author) / Walters, W. D. (author) / Coleman, P. G. (author)

Published in:

APPLIED SURFACE SCIENCE ; 255 ; 75-77

Publication date:

2008-01-01

Size:

3 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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