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Secondary ion emission from Si bombarded with large Ar cluster ions under UHV conditions

Ninomiya, S. / Ichiki, K. / Nakata, Y. / Honda, Y. / Seki, T. / Aoki, T. / Matsuo, J.

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Secondary ion emission from Si bombarded with large Ar cluster ions under UHV conditions

Ninomiya, S. / Ichiki, K. / Nakata, Y. / Honda, Y. / Seki, T. / Aoki, T. / Matsuo, J.

Secondary ion emission from Si bombarded with large Ar cluster ions under UHV conditions

Ninomiya, S. / Ichiki, K. / Nakata, Y. / Honda, Y. / Seki, T. / Aoki, T. / Matsuo, J.

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Document information

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Document information

Title:

Secondary ion emission from Si bombarded with large Ar cluster ions under UHV conditions

Contributors:

Ninomiya, S. (author) / Ichiki, K. (author) / Nakata, Y. (author) / Honda, Y. (author) / Seki, T. (author) / Aoki, T. (author) / Matsuo, J. (author)

Published in:

APPLIED SURFACE SCIENCE ; 255 ; 880-882

Publication date:

2008-01-01

Size:

3 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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