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Positive secondary Ion emission from Si1-xGex bombarded by O2+

Mikami, A. / Okazawa, T. / Saito, K. / Kido, Y.

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Positive secondary Ion emission from Si1-xGex bombarded by O2+

Mikami, A. / Okazawa, T. / Saito, K. / Kido, Y.

Positive secondary Ion emission from Si1-xGex bombarded by O2+

Mikami, A. / Okazawa, T. / Saito, K. / Kido, Y.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Positive secondary Ion emission from Si1-xGex bombarded by O2+

Contributors:

Mikami, A. (author) / Okazawa, T. (author) / Saito, K. (author) / Kido, Y. (author)

Published in:

APPLIED SURFACE SCIENCE ; 253 ; 1620-1625

Publication date:

2006-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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