Roughness development in the depth profiling with 500eV O2+ beam with the combination of oxygen flooding and sample rotation: Fid-Bau Portal

Roughness development in the depth profiling with 500eV O2+ beam with the combination of oxygen flooding and sample rotation

Gui, D. / Xing, Z. X. / Huang, Y. H. / Mo, Z. Q. / Hua, Y. N. / Zhao, S. P. / Cha, L. Z.

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Roughness development in the depth profiling with 500eV O2+ beam with the combination of oxygen flooding and sample rotation

Gui, D. / Xing, Z. X. / Huang, Y. H. / Mo, Z. Q. / Hua, Y. N. / Zhao, S. P. / Cha, L. Z.

Roughness development in the depth profiling with 500eV O2+ beam with the combination of oxygen flooding and sample rotation

Gui, D. / Xing, Z. X. / Huang, Y. H. / Mo, Z. Q. / Hua, Y. N. / Zhao, S. P. / Cha, L. Z.

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Title:

Roughness development in the depth profiling with 500eV O2+ beam with the combination of oxygen flooding and sample rotation

Contributors:

Gui, D. (author) / Xing, Z. X. (author) / Huang, Y. H. (author) / Mo, Z. Q. (author) / Hua, Y. N. (author) / Zhao, S. P. (author) / Cha, L. Z. (author)

Published in:

APPLIED SURFACE SCIENCE ; 255 ; 1433-1436

Publication date:

2008-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Liu, R. / Wee, A. T. S. | British Library Online Contents | 2004

Oxygen flooding and sample cooling during depth profiling of HfSiON thin films

Miwa, S. | British Library Online Contents | 2008

High depth resolution depth profiling of metal films using SIMS and sample rotation

Sykes, D. E. / Chew, A. / Hems, J. et al. | British Library Online Contents | 1996

High depth resolution depth profiling of metal films using SIMS and sample rotation

Sykes, D. E. / Chew, A. / Hems, J. et al. | British Library Online Contents | 1996

RESISTANCE TO FLOODING BY MEGA-ROUGHNESS

Sanders, B.F. / Mrse, R.D. / International Association of Hydraulic Engineering and Research et al. | British Library Conference Proceedings | 2007