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Sub-keV secondary ion mass spectrometry depth profiling: comparison of sample rotation and oxygen flooding

Liu, R. / Wee, A. T. S.

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Sub-keV secondary ion mass spectrometry depth profiling: comparison of sample rotation and oxygen flooding

Liu, R. / Wee, A. T. S.

Sub-keV secondary ion mass spectrometry depth profiling: comparison of sample rotation and oxygen flooding

Liu, R. / Wee, A. T. S.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Sub-keV secondary ion mass spectrometry depth profiling: comparison of sample rotation and oxygen flooding

Contributors:

Liu, R. (author) / Wee, A. T. S. (author)

Published in:

APPLIED SURFACE SCIENCE ; 231/232 ; 653-657

Publication date:

2004-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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