Influences of annealing temperature on the optical properties of SiOx thin film prepared by reactive magnetron sputtering: Fid-Bau Portal

Influences of annealing temperature on the optical properties of SiOx thin film prepared by reactive magnetron sputtering

Huang, F. / Song, Q. / Li, M. / Xie, B. / Wang, H. / Jiang, Y. / Song, Y.

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Influences of annealing temperature on the optical properties of SiOx thin film prepared by reactive magnetron sputtering

Huang, F. / Song, Q. / Li, M. / Xie, B. / Wang, H. / Jiang, Y. / Song, Y.

Influences of annealing temperature on the optical properties of SiOx thin film prepared by reactive magnetron sputtering

Huang, F. / Song, Q. / Li, M. / Xie, B. / Wang, H. / Jiang, Y. / Song, Y.

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Access via TIB

Check availability in my library

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Document information

Title:

Influences of annealing temperature on the optical properties of SiOx thin film prepared by reactive magnetron sputtering

Contributors:

Huang, F. (author) / Song, Q. (author) / Li, M. (author) / Xie, B. (author) / Wang, H. (author) / Jiang, Y. (author) / Song, Y. (author)

Published in:

APPLIED SURFACE SCIENCE ; 255 ; 2006-2011

Publication date:

2008-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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