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Influences of annealing temperature on the optical properties of SiOx thin film prepared by reactive magnetron sputtering

Huang, F. / Song, Q. / Li, M. / Xie, B. / Wang, H. / Jiang, Y. / Song, Y.

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Influences of annealing temperature on the optical properties of SiOx thin film prepared by reactive magnetron sputtering

Huang, F. / Song, Q. / Li, M. / Xie, B. / Wang, H. / Jiang, Y. / Song, Y.

Influences of annealing temperature on the optical properties of SiOx thin film prepared by reactive magnetron sputtering

Huang, F. / Song, Q. / Li, M. / Xie, B. / Wang, H. / Jiang, Y. / Song, Y.

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Zugriff über TIB

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Bestellung bei Subito €

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Titel:

Influences of annealing temperature on the optical properties of SiOx thin film prepared by reactive magnetron sputtering

Beteiligte:

Huang, F. (Autor:in) / Song, Q. (Autor:in) / Li, M. (Autor:in) / Xie, B. (Autor:in) / Wang, H. (Autor:in) / Jiang, Y. (Autor:in) / Song, Y. (Autor:in)

Erschienen in:

APPLIED SURFACE SCIENCE ; 255 ; 2006-2011

Erscheinungsdatum:

01.01.2008

Format / Umfang:

6 pages

ISSN:

0169-4332

Medientyp:

Aufsatz (Zeitschrift)

Format:

Sprache:

Englisch

Klassifikation:

DDC: 621.35

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