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Interface metallization and electrical characterization of Ta-Pt multilayers on n-type SiC

Yang, H. / Peng, T. H. / Wang, W. J. / Wang, W. Y. / Chen, X. L.

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Interface metallization and electrical characterization of Ta-Pt multilayers on n-type SiC

Yang, H. / Peng, T. H. / Wang, W. J. / Wang, W. Y. / Chen, X. L.

Interface metallization and electrical characterization of Ta-Pt multilayers on n-type SiC

Yang, H. / Peng, T. H. / Wang, W. J. / Wang, W. Y. / Chen, X. L.

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Document information

Title:

Interface metallization and electrical characterization of Ta-Pt multilayers on n-type SiC

Contributors:

Yang, H. (author) / Peng, T. H. (author) / Wang, W. J. (author) / Wang, W. Y. (author) / Chen, X. L. (author)

Published in:

APPLIED SURFACE SCIENCE ; 255 ; 3121-3125

Publication date:

2008-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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