Structural and electrical characterisation of ion-implanted strained silicon: Fid-Bau Portal

Structural and electrical characterisation of ion-implanted strained silicon

Horan, K. / Lankinen, A. / O'Reilly, L. / Bennett, N. S. / McNally, P. J. / Sealy, B. J. / Cowern, N. E. / Tuomi, T. O.

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Structural and electrical characterisation of ion-implanted strained silicon

Horan, K. / Lankinen, A. / O'Reilly, L. / Bennett, N. S. / McNally, P. J. / Sealy, B. J. / Cowern, N. E. / Tuomi, T. O.

Structural and electrical characterisation of ion-implanted strained silicon

Horan, K. / Lankinen, A. / O'Reilly, L. / Bennett, N. S. / McNally, P. J. / Sealy, B. J. / Cowern, N. E. / Tuomi, T. O.

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Title:

Structural and electrical characterisation of ion-implanted strained silicon

Contributors:

Horan, K. (author) / Lankinen, A. (author) / O'Reilly, L. (author) / Bennett, N. S. (author) / McNally, P. J. (author) / Sealy, B. J. (author) / Cowern, N. E. (author) / Tuomi, T. O. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B ADVANCED FUNCTIONAL SOLID STATE MATERIALS ; 154-155 ; 118-121

Publication date:

2008-01-01

Size:

4 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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