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Observations of structural order in ion-implanted amorphous silicon

Cheng, J.-Y. / Gibson, J. M. / Jacobson, D. C.

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Observations of structural order in ion-implanted amorphous silicon

Cheng, J.-Y. / Gibson, J. M. / Jacobson, D. C.

Observations of structural order in ion-implanted amorphous silicon

Cheng, J.-Y. / Gibson, J. M. / Jacobson, D. C.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Observations of structural order in ion-implanted amorphous silicon

Contributors:

Cheng, J.-Y. (author) / Gibson, J. M. (author) / Jacobson, D. C. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 16 ; 3030-3033

Publication date:

2001-01-01

Size:

4 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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