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Oxidation of very low energy nitrogen-implanted strained-silicon

Kelaidis, N. / Skarlatos, D. / Ioannou-Sougleridis, V. / Tsamis, C. / Komninou, P. / Kellerman, B. / Seacrist, M.

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Oxidation of very low energy nitrogen-implanted strained-silicon

Kelaidis, N. / Skarlatos, D. / Ioannou-Sougleridis, V. / Tsamis, C. / Komninou, P. / Kellerman, B. / Seacrist, M.

Oxidation of very low energy nitrogen-implanted strained-silicon

Kelaidis, N. / Skarlatos, D. / Ioannou-Sougleridis, V. / Tsamis, C. / Komninou, P. / Kellerman, B. / Seacrist, M.

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Check availability in my library

Order at Subito €

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Document information

Title:

Oxidation of very low energy nitrogen-implanted strained-silicon

Contributors:

Kelaidis, N. (author) / Skarlatos, D. (author) / Ioannou-Sougleridis, V. (author) / Tsamis, C. (author) / Komninou, P. (author) / Kellerman, B. (author) / Seacrist, M. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 135 ; 199-202

Publication date:

2006-01-01

Size:

4 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Skarlatos, D. / Tsamis, C. / Perego, M. et al. | British Library Online Contents | 2005

Structural and electrical characterisation of ion-implanted strained silicon

Horan, K. / Lankinen, A. / O'Reilly, L. et al. | British Library Online Contents | 2008

Planar oxidation of strained silicon substrates

Lin, M.-T. / Jaccodine, R. J. / Delph, T. J. | British Library Online Contents | 2001

Oxidation of ion implanted silicon carbide

Makhtari, A. / Raineri, V. / La Via, F. et al. | British Library Online Contents | 2001

Defect Profiling with Low Energy Positrons of Nitrogen Implanted Silicon

Van der Werf, D. P. / Saleh, A. S. / Towner, A. et al. | British Library Online Contents | 1997