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    Boron out-diffusion mechanism in oxide and nitride CMOS sidewall spacer: Impact of the materials properties

    New search for: Pelletier, B.
    New search for: Juhel, M.
    New search for: Trouiller, C.
    New search for: Beucher, D.
    New search for: Autran, J. L.
    New search for: Morin, P.

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    Boron out-diffusion mechanism in oxide and nitride CMOS sidewall spacer: Impact of the materials properties

    New search for: Pelletier, B.
    New search for: Juhel, M.
    New search for: Trouiller, C.
    New search for: Beucher, D.
    New search for: Autran, J. L.
    New search for: Morin, P.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Boron out-diffusion mechanism in oxide and nitride CMOS sidewall spacer: Impact of the materials properties

    New search for: Pelletier, B.
    New search for: Juhel, M.
    New search for: Trouiller, C.
    New search for: Beucher, D.
    New search for: Autran, J. L.
    New search for: Morin, P.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Boron out-diffusion mechanism in oxide and nitride CMOS sidewall spacer: Impact of the materials properties

    Contributors:

    Pelletier, B. (author) / Juhel, M. (author) / Trouiller, C. (author) / Beucher, D. (author) / Autran, J. L. (author) / Morin, P. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING B ADVANCED FUNCTIONAL SOLID STATE MATERIALS ; 154-155 ; 252-255

    Publication date:

    2008-01-01

    Size:

    4 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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