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    Subsurface Structures of Monocrystalline Silicon Generated by Nanogrinding

    New search for: Huang, H.
    New search for: Wu, Y.Q.
    New search for: Wang, Y.
    New search for: Zou, J.
    New search for: Zhou, L.B.

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    Subsurface Structures of Monocrystalline Silicon Generated by Nanogrinding

    New search for: Huang, H.
    New search for: Wu, Y.Q.
    New search for: Wang, Y.
    New search for: Zou, J.
    New search for: Zhou, L.B.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Subsurface Structures of Monocrystalline Silicon Generated by Nanogrinding

    New search for: Huang, H.
    New search for: Wu, Y.Q.
    New search for: Wang, Y.
    New search for: Zou, J.
    New search for: Zhou, L.B.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Subsurface Structures of Monocrystalline Silicon Generated by Nanogrinding

    Contributors:

    Huang, H. (author) / Wu, Y.Q. (author) / Wang, Y. (author) / Zou, J. (author) / Zhou, L.B. (author)

    Published in:

    KEY ENGINEERING MATERIALS ; 389/390 ; 465-468

    Publication date:

    2009-01-01

    Size:

    4 pages

    ISSN:

    1013-9826

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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