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    Characteristics of silicon substrates fabricated using nanogrinding and chemo-mechanical-grinding

    New search for: Huang, H.
    New search for: Wang, B. L.
    New search for: Wang, Y.
    New search for: Zou, J.
    New search for: Zhou, L.

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    Characteristics of silicon substrates fabricated using nanogrinding and chemo-mechanical-grinding

    New search for: Huang, H.
    New search for: Wang, B. L.
    New search for: Wang, Y.
    New search for: Zou, J.
    New search for: Zhou, L.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Characteristics of silicon substrates fabricated using nanogrinding and chemo-mechanical-grinding

    New search for: Huang, H.
    New search for: Wang, B. L.
    New search for: Wang, Y.
    New search for: Zou, J.
    New search for: Zhou, L.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Characteristics of silicon substrates fabricated using nanogrinding and chemo-mechanical-grinding

    Contributors:

    Huang, H. (author) / Wang, B. L. (author) / Wang, Y. (author) / Zou, J. (author) / Zhou, L. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING A ; 479 ; 373-379

    Publication date:

    2008-01-01

    Size:

    7 pages

    ISSN:

    0921-5093

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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