Damage-Free Planarization of 2-Inch 4H-SiC Wafer Using Pt Catalyst Plate and HF Solution: Fid-Bau Portal

Damage-Free Planarization of 2-Inch 4H-SiC Wafer Using Pt Catalyst Plate and HF Solution

Okamoto, T. / Sano, Y. / Hara, H. / Arima, K. / Yagi, K. / Murata, J. / Mimura, H. / Yamauchi, K.

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Damage-Free Planarization of 2-Inch 4H-SiC Wafer Using Pt Catalyst Plate and HF Solution

Okamoto, T. / Sano, Y. / Hara, H. / Arima, K. / Yagi, K. / Murata, J. / Mimura, H. / Yamauchi, K.

Damage-Free Planarization of 2-Inch 4H-SiC Wafer Using Pt Catalyst Plate and HF Solution

Okamoto, T. / Sano, Y. / Hara, H. / Arima, K. / Yagi, K. / Murata, J. / Mimura, H. / Yamauchi, K.

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Title:

Damage-Free Planarization of 2-Inch 4H-SiC Wafer Using Pt Catalyst Plate and HF Solution

Contributors:

Okamoto, T. (author) / Sano, Y. (author) / Hara, H. (author) / Arima, K. (author) / Yagi, K. (author) / Murata, J. (author) / Mimura, H. (author) / Yamauchi, K. (author)

Published in:

MATERIALS SCIENCE FORUM ; 600/603 ; 835-838

Publication date:

2009-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Okamoto, T. / Sano, Y. / Hara, H. et al. | British Library Online Contents | 2009

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Hara, H. / Sano, Y. / Mimura, H. et al. | British Library Online Contents | 2007

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