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    Damage-Free Planarization of 4H-SiC (0001) by Catalyst-Referred Etching

    New search for: Hara, H.
    New search for: Sano, Y.
    New search for: Mimura, H.
    New search for: Arima, K.
    New search for: Kubota, A.
    New search for: Yagi, K.
    New search for: Murata, J.
    New search for: Yamauchi, K.
    New search for: Wright, N.
    New search for: Johnson, C. M.
    New search for: Vassilevski, K.
    New search for: Nikitina, I.
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    Damage-Free Planarization of 4H-SiC (0001) by Catalyst-Referred Etching

    New search for: Hara, H.
    New search for: Sano, Y.
    New search for: Mimura, H.
    New search for: Arima, K.
    New search for: Kubota, A.
    New search for: Yagi, K.
    New search for: Murata, J.
    New search for: Yamauchi, K.
    New search for: Wright, N.
    New search for: Johnson, C. M.
    New search for: Vassilevski, K.
    New search for: Nikitina, I.
    New search for: Horsfall, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Damage-Free Planarization of 4H-SiC (0001) by Catalyst-Referred Etching

    New search for: Hara, H.
    New search for: Sano, Y.
    New search for: Mimura, H.
    New search for: Arima, K.
    New search for: Kubota, A.
    New search for: Yagi, K.
    New search for: Murata, J.
    New search for: Yamauchi, K.
    New search for: Wright, N.
    New search for: Johnson, C. M.
    New search for: Vassilevski, K.
    New search for: Nikitina, I.
    New search for: Horsfall, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
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    Document information
    Title:

    Damage-Free Planarization of 4H-SiC (0001) by Catalyst-Referred Etching

    Contributors:

    Hara, H. (author) / Sano, Y. (author) / Mimura, H. (author) / Arima, K. (author) / Kubota, A. (author) / Yagi, K. (author) / Murata, J. (author) / Yamauchi, K. (author) / Wright, N. / Johnson, C. M.

    Published in:

    Silicon Carbide and Related Materials 2006 ; 749-752

    MATERIALS SCIENCE FORUM ; 556/557

    Publication date:

    2007-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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