Abrasive-Free Planarization of 3-Inch 4H-SiC Substrate Using Catalyst-Referred Etching: Fid-Bau Portal

Abrasive-Free Planarization of 3-Inch 4H-SiC Substrate Using Catalyst-Referred Etching

Okamoto, T. / Sano, Y. / Tachibana, K. / Arima, K. / Hattori, A.N. / Yagi, K. / Murata, J. / Sadakuni, S. / Yamauchi, K.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Abrasive-Free Planarization of 3-Inch 4H-SiC Substrate Using Catalyst-Referred Etching

Okamoto, T. / Sano, Y. / Tachibana, K. / Arima, K. / Hattori, A.N. / Yagi, K. / Murata, J. / Sadakuni, S. / Yamauchi, K.

Abrasive-Free Planarization of 3-Inch 4H-SiC Substrate Using Catalyst-Referred Etching

Okamoto, T. / Sano, Y. / Tachibana, K. / Arima, K. / Hattori, A.N. / Yagi, K. / Murata, J. / Sadakuni, S. / Yamauchi, K.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Abrasive-Free Planarization of 3-Inch 4H-SiC Substrate Using Catalyst-Referred Etching

Contributors:

Okamoto, T. (author) / Sano, Y. (author) / Tachibana, K. (author) / Arima, K. (author) / Hattori, A.N. (author) / Yagi, K. (author) / Murata, J. (author) / Sadakuni, S. (author) / Yamauchi, K. (author) / Monakhov, E.V.

Published in:

Silicon Carbide and Related Materials 2010 ; 493-495

MATERIALS SCIENCE FORUM ; 679/680

Publication date:

2011-01-01

Size:

3 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Hara, H. / Sano, Y. / Mimura, H. et al. | British Library Online Contents | 2007

4H-SiC Planarization Using Catalyst-Referred Etching with Pure Water

Isohashi, A. / Sano, Y. / Sadakuni, S. et al. | British Library Online Contents | 2014

Planarization of the Gallium Nitride Substrate Grown by the Na Flux Method Applying Catalyst-Referred Etching

Yamaguchi, W. / Sadakuni, S. / Isohashi, A. et al. | British Library Online Contents | 2014

Damage-Free Planarization of 2-Inch 4H-SiC Wafer Using Pt Catalyst Plate and HF Solution

Okamoto, T. / Sano, Y. / Hara, H. et al. | British Library Online Contents | 2009

Damage-Free Planarization of 2-Inch 4H-SiC Wafer Using Pt Catalyst Plate and HF Solution

Okamoto, T. / Sano, Y. / Hara, H. et al. | British Library Online Contents | 2009