Surface Morphology of AlN Epitaxial Layer Grown on Various SiC Substrates by Sublimation Closed Space Technique: Fid-Bau Portal

Surface Morphology of AlN Epitaxial Layer Grown on Various SiC Substrates by Sublimation Closed Space Technique

Lee, G.S. / Kyun, M.O. / Hwang, H.H. / An, J.H. / Lee, W.J. / Shin, B.C. / Nishino, S.

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Surface Morphology of AlN Epitaxial Layer Grown on Various SiC Substrates by Sublimation Closed Space Technique

Lee, G.S. / Kyun, M.O. / Hwang, H.H. / An, J.H. / Lee, W.J. / Shin, B.C. / Nishino, S.

Surface Morphology of AlN Epitaxial Layer Grown on Various SiC Substrates by Sublimation Closed Space Technique

Lee, G.S. / Kyun, M.O. / Hwang, H.H. / An, J.H. / Lee, W.J. / Shin, B.C. / Nishino, S.

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Title:

Surface Morphology of AlN Epitaxial Layer Grown on Various SiC Substrates by Sublimation Closed Space Technique

Contributors:

Lee, G.S. (author) / Kyun, M.O. (author) / Hwang, H.H. (author) / An, J.H. (author) / Lee, W.J. (author) / Shin, B.C. (author) / Nishino, S. (author)

Published in:

MATERIALS SCIENCE FORUM ; 600/603 ; 1285-1288

Publication date:

2009-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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Ono, R. / Fujimaki, M. / Hon-Joo, N. et al. | British Library Online Contents | 2003