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Extremely Uniform, High Quality SiC Epitaxy on 100-mm Substrates

Sumakeris, J.J. / Henning, J. / O Loughlin, M.J. / Sriram, S. / Balakrishna, V.

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Extremely Uniform, High Quality SiC Epitaxy on 100-mm Substrates

Sumakeris, J.J. / Henning, J. / O Loughlin, M.J. / Sriram, S. / Balakrishna, V.

Extremely Uniform, High Quality SiC Epitaxy on 100-mm Substrates

Sumakeris, J.J. / Henning, J. / O Loughlin, M.J. / Sriram, S. / Balakrishna, V.

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Check availability in my library

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Document information

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Document information

Title:

Extremely Uniform, High Quality SiC Epitaxy on 100-mm Substrates

Contributors:

Sumakeris, J.J. (author) / Henning, J. (author) / O Loughlin, M.J. (author) / Sriram, S. (author) / Balakrishna, V. (author)

Published in:

MATERIALS SCIENCE FORUM ; 600/603 ; 99-102

Publication date:

2009-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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