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Structure and mechanical properties of reactive sputtering CrSiN films

Zhang, G. / Wang, L. / Wang, S. C. / Yan, P. / Xue, Q.

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Structure and mechanical properties of reactive sputtering CrSiN films

Zhang, G. / Wang, L. / Wang, S. C. / Yan, P. / Xue, Q.

Structure and mechanical properties of reactive sputtering CrSiN films

Zhang, G. / Wang, L. / Wang, S. C. / Yan, P. / Xue, Q.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

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Document information

Title:

Structure and mechanical properties of reactive sputtering CrSiN films

Contributors:

Zhang, G. (author) / Wang, L. (author) / Wang, S. C. (author) / Yan, P. (author) / Xue, Q. (author)

Published in:

APPLIED SURFACE SCIENCE ; 255 ; 4425-4429

Publication date:

2009-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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