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Picosecond pulsed laser ablation and micromachining of 4H-SiC wafers

Molian, P. / Pecholt, B. / Gupta, S.

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Picosecond pulsed laser ablation and micromachining of 4H-SiC wafers

Molian, P. / Pecholt, B. / Gupta, S.

Picosecond pulsed laser ablation and micromachining of 4H-SiC wafers

Molian, P. / Pecholt, B. / Gupta, S.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

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Document information

Title:

Picosecond pulsed laser ablation and micromachining of 4H-SiC wafers

Contributors:

Molian, P. (author) / Pecholt, B. (author) / Gupta, S. (author)

Published in:

APPLIED SURFACE SCIENCE ; 255 ; 4515-4520

Publication date:

2009-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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