Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    TOPOGRAPHICAL EVOLUTION OF MAGNETRON SPUTTERING Ti THIN FILMS DURING OXIDATION OBSERVED BY AFM

    New search for: Li, X.
    New search for: Jin, Y.
    New search for: Liu, D.
    New search for: Zeng, X.
    New search for: Yang, R.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    TOPOGRAPHICAL EVOLUTION OF MAGNETRON SPUTTERING Ti THIN FILMS DURING OXIDATION OBSERVED BY AFM

    New search for: Li, X.
    New search for: Jin, Y.
    New search for: Liu, D.
    New search for: Zeng, X.
    New search for: Yang, R.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    TOPOGRAPHICAL EVOLUTION OF MAGNETRON SPUTTERING Ti THIN FILMS DURING OXIDATION OBSERVED BY AFM

    New search for: Li, X.
    New search for: Jin, Y.
    New search for: Liu, D.
    New search for: Zeng, X.
    New search for: Yang, R.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    TOPOGRAPHICAL EVOLUTION OF MAGNETRON SPUTTERING Ti THIN FILMS DURING OXIDATION OBSERVED BY AFM

    Contributors:

    Li, X. (author) / Jin, Y. (author) / Liu, D. (author) / Zeng, X. (author) / Yang, R. (author)

    Published in:

    SURFACE REVIEW AND LETTERS ; 18 ; 61-69

    Publication date:

    2011-01-01

    Size:

    9 pages

    ISSN:

    0218-625X

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  530.417

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    LaB~x thin films prepared by magnetron sputtering

    Kinbara, A. / Nakano, T. / Kobayashi, A. et al. | British Library Online Contents | 1993

    LaB~x thin films prepared by magnetron sputtering

    Kinbara, A. / Nakano, T. / Kobayashi, A. et al. | British Library Online Contents | 1993

    Oxidation Resistance of TiAlSiN Films Prepared by Magnetron Sputtering

    Huang, Man / Zhang, Ji / Wang, Qi-jun et al. | British Library Online Contents | 2016

    Temperature-dependent microstructural evolution of Ti2AlN thin films deposited by reactive magnetron sputtering

    Zhang, Zheng / Jin, Hongmei / Chai, Jianwei et al. | British Library Online Contents | 2016

    Temperature-dependent microstructural evolution of Ti2AlN thin films deposited by reactive magnetron sputtering

    Zhang, Z. / Jin, H. / Chai, J. et al. | British Library Online Contents | 2016

    Back to top