Synthesis of Ti-Si-N nanocomposite coatings by a novel cathodic arc assisted middle-frequency magnetron sputtering: Fid-Bau Portal

Synthesis of Ti-Si-N nanocomposite coatings by a novel cathodic arc assisted middle-frequency magnetron sputtering

Yang, Z. T. / Yang, B. / Guo, L. P. / Fu, D. J.

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Synthesis of Ti-Si-N nanocomposite coatings by a novel cathodic arc assisted middle-frequency magnetron sputtering

Yang, Z. T. / Yang, B. / Guo, L. P. / Fu, D. J.

Synthesis of Ti-Si-N nanocomposite coatings by a novel cathodic arc assisted middle-frequency magnetron sputtering

Yang, Z. T. / Yang, B. / Guo, L. P. / Fu, D. J.

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Check availability in my library

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Document information

Title:

Synthesis of Ti-Si-N nanocomposite coatings by a novel cathodic arc assisted middle-frequency magnetron sputtering

Contributors:

Yang, Z. T. (author) / Yang, B. (author) / Guo, L. P. (author) / Fu, D. J. (author)

Published in:

APPLIED SURFACE SCIENCE ; 255 ; 4720-4724

Publication date:

2009-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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